Highly Conductive SrVO3 as a bottom electrode for functional perovskite oxides

Jarrett A Moyer1, Craig Eaton, Roman Engel-Herbert

  • 1Department of Physics, Pennsylvania State University, University Park, PA 16802, USA.

Summary

Strontium vanadate (SrVO3) thin films offer superior performance as bottom electrode materials. These films exhibit lower resistivity and enhanced chemical stability, paving the way for advanced oxide electronics.

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