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Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
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Plasma debris sputter resistant x-ray mirror.

Sho Amano1, Tomoaki Inoue, Tetsuo Harada

  • 1Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Ako, Hyogo, Japan. sho@lasti.u-hyogo.ac.jp

Applied Optics
|June 6, 2013
PubMed
Summary

Diamond-like carbon (DLC) mirrors offer superior sputtering resistance in plasma x-ray sources. These DLC mirrors demonstrate significantly higher durability against plasma debris compared to traditional materials like ruthenium and gold.

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Area of Science:

  • Materials Science
  • Plasma Physics
  • Optics

Background:

  • Grazing incident mirrors are crucial components in plasma x-ray sources.
  • Traditional mirror materials like ruthenium (Ru) and gold (Au) are susceptible to sputtering from plasma debris.
  • Developing robust mirror materials is essential for maintaining the performance and longevity of plasma-based technologies.

Purpose of the Study:

  • To evaluate the sputtering resistance of diamond-like carbon (DLC) films for use as grazing incident mirrors in plasma x-ray sources.
  • To compare the performance of DLC mirrors against traditional materials (Ru and Au) under plasma exposure.
  • To assess the reflectivity of DLC mirrors at a relevant wavelength for plasma applications.

Main Methods:

  • DLC mirror reflectivity was measured at 13.5 nm using synchrotron radiation at the NewSUBARU facility.

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  • Sputtering resistance was quantified using a laser-produced Xenon (Xe) plasma source at a 20° incident debris angle.
  • Erosion rates were compared between DLC, Ru, and Au films.

    • Main Results:

    • DLC mirrors exhibited high reflectivity at 13.5 nm.
    • DLC films showed 5-fold and 15-fold higher sputtering resistance compared to Ru and Au films, respectively.
    • DLC demonstrated significant resistance to tin (Sn) ions, suggesting suitability for Sn plasma source applications.

    Conclusions:

    • Diamond-like carbon (DLC) is a highly sputtering-resistant material for grazing incident x-ray mirrors in plasma environments.
    • DLC mirrors offer a durable alternative to conventional materials, enhancing the reliability of plasma x-ray sources.
    • The findings support the use of DLC coatings for advanced plasma debris sputtering resistant mirror applications.