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Updated: May 10, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Wiebke Eckstein1, Ernst-Bernhard Kley, Andreas Tünnermann
1Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena, Max Wien Platz 1, 07743 Jena, Germany. wiebke.eckstein@uni-jena.de
Binary subwavelength structures offer a new way to create computer-generated holograms (CGHs). A faster simulation method, the fast Fourier transform beam propagation method (FFT-BPM), improves accuracy compared to current techniques.
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