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Updated: May 10, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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Note: Nonlinearity error compensated absolute planar position measurement using a two-dimensional phase-encoded

Jong-Ahn Kim1, Jae Wan Kim, Chu-Shik Kang

  • 1Center for Length, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, Daejeon 305-340, South Korea.

The Review of Scientific Instruments
|June 8, 2013
PubMed
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A novel absolute planar position measurement method uses a 2D phase-encoded binary grating to achieve inherent nonlinearity error compensation. This technique enhances precision for nanometer-scale motion tracking and positioning systems.

Area of Science:

  • Metrology and Measurement Science
  • Optics and Photonics
  • Nanotechnology

Background:

  • Accurate absolute planar position measurement is crucial for advanced manufacturing and scientific instrumentation.
  • Traditional methods often suffer from nonlinearity errors, limiting precision.
  • Existing techniques require complex calibration or are susceptible to environmental factors.

Purpose of the Study:

  • To introduce a new absolute planar position measurement method with inherent nonlinearity error compensation.
  • To analyze the performance of a two-dimensional phase-encoded binary grating system.
  • To demonstrate improved accuracy in nanometer-scale measurements.

Main Methods:

  • Utilizing a two-dimensional phase-encoded binary grating for position sensing.

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Related Experiment Videos

Last Updated: May 10, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
10:39

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

Published on: October 11, 2016

Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator
08:39

Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator

Published on: January 28, 2019

A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings
08:23

A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings

Published on: September 30, 2019

  • Analyzing orthogonally accumulated intensity profiles for absolute position determination.
  • Implementing a sub-division process with modified binary code configuration and shift-averaging for nonlinearity error compensation.

    • Main Results:

    • Successfully measured a circular trajectory with a 100 nm radius.
    • Demonstrated inherent compensation of nonlinearity errors.
    • Reduced nonlinearity error to less than 15 nm through the proposed method.
    • Achieved comparable results to laser interferometry.

    Conclusions:

    • The proposed method offers a robust and accurate approach for absolute planar position measurement.
    • Inherent nonlinearity error compensation significantly enhances measurement precision.
    • This technique has potential applications in high-precision positioning systems and nanoscale metrology.