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Note: High-performance HeNe laser feedback interferometer with birefringence feedback cavity scanned by piezoelectric
Yun Wu1, Yidong Tan, Zhaoli Zeng
1The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China.
Abstract:
We demonstrate a high-performance HeNe laser feedback interferometer (HLFI) based on a birefringence feedback cavity scanned by a piezoelectric transducer (PZT). The PZT scanning technique leads to a significant improvement in the HLFI's anti-jamming capability. The null drift under general laboratory conditions is approximately ±32 nm, corresponding to ±2 pulses. The phase difference between the two measurement signals does not vary when the feedback cavity length changes. This ensures a large measurement range for the HLFI. The HLFI presented here features a large measurement range (>1 m), nanometer-scale resolution (15.82 nm), a compact configuration, and low cost.
