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PMN-PT-PZT composite films for high frequency ultrasonic transducer applications
Hsiu-Sheng Hsu1, Vatcharee Benjauthrit, Fan Zheng
1Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, CA 90089, USA ; Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089, USA.
Abstract:
We have successfully fabricated x(0.65PMN-0.35PT)-(1 - x)PZT (xPMN-PT-(1 - x)PZT), where x is 0.1, 0.3, 0.5, 0.7 and 0.9, thick films with a thickness of approximately 9 µm on platinized silicon substrate by employing a composite sol-gel technique. X-ray diffraction analysis and scanning electron microscopy revealed that these films are dense and creak-free with well-crystallized perovskite phase in the whole composition range. The dielectric constant can be controllably adjusted by using different compositions. Higher PZT content of xPMN-PT-(1 - x)PZT films show better ferroelectric properties. A representative 0.9PMN-PT-0.1PZT thick film transducer is built. It has 200 MHz center frequency with a -6 dB bandwidth of 38% (76 MHz). The measured two-way insertion loss is 65 dB.
