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Updated: May 10, 2026
09:27
Encapsulation and Permeability Characteristics of Plasma Polymerized Hollow Particles
Published on: August 16, 2012
Defining plasma polymerization: new insight into what we should be measuring
Andrew Michelmore1, Christine Charles, Rod W Boswell
1Mawson Institute, University of South Australia, Mawson Lakes Campus, 5095, Adelaide, Australia. andrew.michelmore@unisa.edu.au
ACS Applied Materials & Interfaces
|June 14, 2013
Summary
External parameters like RF power do not reliably reproduce plasma polymer films across different reactor geometries. Controlling intrinsic plasma properties, such as ion flux, provides a more consistent method for defining plasma polymerization processes.
Area of Science:
- Materials Science
- Plasma Physics
- Chemical Engineering
Background:
- Plasma polymerization experiments are typically defined by external parameters such as radio frequency (RF) power and precursor flow rate.
- Reproducing plasma polymer films across different reactor geometries using these external parameters has proven challenging.
Purpose of the Study:
- To investigate the limitations of external parameters in defining plasma polymerization experiments.
- To demonstrate a more reliable method for defining plasma polymerization processes across varying reactor geometries.
Main Methods:
- Utilized a parallel-plate electrode reactor with variable geometry.
- Measured ion flux and power coupling efficiency.
- Evaluated the transferability of plasma polymerization processes across different reactor geometries for four precursors.
Main Results:
- External parameters (RF power, precursor flow rate) are insufficient for reproducing plasma polymer films in reactors with different geometries.
- Intrinsic plasma properties, such as ion flux and power coupling efficiency, vary significantly with reactor geometry even at constant RF power.
- Controlling intrinsic parameters, specifically ion flux, enables more reproducible plasma polymerization.
Conclusions:
- Intrinsic plasma properties are critical for defining plasma polymerization processes, rather than solely relying on external parameters.
- Ion flux control offers a widely applicable method for defining plasma polymerization, especially for saturated and allylic precursors.
- Reactor geometry significantly influences plasma properties, impacting the reproducibility of plasma polymer films.
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