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Updated: May 10, 2026
Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices
Published on: October 6, 2020
Strict in-plane alignment control of block-copolymer-templated mesostructured silica films using an
Wataru Kubo1, Masahiko Takahashi, Kohei Okamoto
1Frontier Research Center, Canon Inc., 3-30-2, Shimomaruko, Ohta-ku, Tokyo 146-8501, Japan. kubo.wataru@canon.co.jp
Abstract:
An alkoxysilane with an alkyl chain is introduced as an alignment-controlling agent of a block-copolymer-templated mesostructured silica film. Use of the alkylalkoxysilane achieves the alignment of the mesochannels of a triblock-copolymer-templated film by an intermolecular interaction with a rubbing-treated polyimide film. Co-use of an alkoxysilane with a hydroxymethyl group as a hydrophobicity reducing agent improves the alignment close to that of the film prepared using an alkyl surfactant. This concept widens the range of the structural period of aligned mesoporous films and thus widens the useful range of the anisotropic optical properties.
