Dissociative electron attachment to hexafluoroacetylacetone and its bidentate metal complexes M(hfac)2; M = Cu, Pd

Beta-diketones are a versatile class of compounds that can complex almost any metal in the periodic table of elements. Their metal complexes are found to be fairly stable and generally have sufficient vapor pressure for deposition techniques requiring volatile metal sources. Motivated by the potential role of low energy electrons in focused electron beam induced deposition, we have carried out a crossed electron∕molecular beam study on the dissociative electron attachment and non-dissociative electron attachment (NDEA) to hexafluoroacetylacetone (HFAc) and its bidentate metal complexes: bis-hexafluoroacetylacetonate copper(II), Cu(hfac)2 and bis-hexafluoroacetylacetonate palladium(II), Pd(hfac)2. The relative ion yield curves for the native precursor to the ligand as well as its stable, 16 valence electron Pd(II) complex and open shell, 17 valence electron Cu(II) complex, are presented and compared. For HFAc, the loss of HF leads to the dominant anion observed, and while NDEA is only weakly pronounced for Pd(hfac)2 and loss of hfac(-) is the main dissociation channel, [Cu(hfac)2](-) formation from Cu(hfac)2 dominates. A comparison of the ion yield curves and the associated resonances gives insight into the role of the ligand in the attachment process and highlights the influence of the central metal atom.