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Updated: May 9, 2026

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
Published on: May 13, 2020
Direct in situ observation of structural transition driven actuation in VO2 utilizing electron transparent
B Viswanath1, Shriram Ramanathan
1Harvard School of Engineering and Applied Sciences, Cambridge, MA 02138, USA. kbviswa@seas.harvard.edu
Abstract:
Direct imaging and quantification of actuation in nanostructures that undergo structural phase transitions could advance our understanding of collective phenomena in the solid state. Here, we demonstrate visualization of structural phase transition induced actuation in a model correlated insulator vanadium dioxide by in situ Fresnel contrast imaging of electron transparent cantilevers. We quantify abrupt, reversible cantilever motion occurring due to the stress relaxation across the structural transition from a monoclinic to tetragonal phase with increasing temperature. Deflections measured in such nanoscale cantilevers can be directly correlated with macroscopic stress measurements by wafer curvature studies as well as temperature dependent electrical conduction allowing one to interrogate lattice dynamics across length scales.

