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Template-stripped, ultraflat gold surfaces with coplanar, embedded titanium micropatterns.

Nagaiyanallur V Venkataraman¹, Jia Pei, Clément V M Cremmel

¹Laboratory for Surface Science and Technology, Department of Materials, ETH Zurich, Wolfgang-Pauli-Strasse 10, CH-8093 Zurich, Switzerland.

Langmuir : the ACS Journal of Surfaces and Colloids

|July 10, 2013

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Researchers created ultraflat gold surfaces with embedded titanium micropatterns using a modified template-stripping method. This technique yields physically uniform surfaces with distinct chemical patterns at the nanoscale, crucial for advanced material applications.

Area of Science:

Materials Science
Surface Science
Nanotechnology

Background:

Fabricating surfaces with nanoscale precision is essential for advanced electronic and sensor applications.
Achieving both physical uniformity and chemical distinctness on a single surface presents significant challenges.

Purpose of the Study:

To develop a method for creating ultraflat surfaces with embedded, chemically distinct metal micropatterns.
To characterize the physical and chemical properties of these novel patterned surfaces.

Main Methods:

A modified template-stripping procedure involving photolithography and metal deposition.
Titanium (Ti) deposition onto predefined silicon template regions.
Backfilling with gold (Au), followed by template stripping to reveal the micropatterned surface.

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Surface characterization using Atomic Force Microscopy (AFM), imaging X-ray Photoelectron Spectroscopy (i-XPS), and Time-of-Flight Secondary-Ion Mass Spectrometry (ToF-SIMS).

Main Results:

Ultraflat gold surfaces with embedded titanium micropatterns were successfully fabricated.
Atomic Force Microscopy confirmed extremely low roughness (<0.5 nm RMS) on both Ti and Au regions.
The gold-titanium interface was topographically indistinguishable.
i-XPS and ToF-SIMS confirmed sharp and complete chemical contrast between well-separated Ti and Au regions across the interface.

Conclusions:

A novel fabrication method yields physically homogeneous, ultraflat surfaces with nanoscale chemical patterning.
The developed technique allows for the precise integration of distinct metallic materials with contrasting surface chemistries.
These surfaces hold potential for applications requiring precise control over surface properties at the nanoscale.