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Updated: May 9, 2026

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

Published on: January 7, 2019

Highly sensitive fiber pressure sensor based on off-center diaphragm reflection.

Zhenbin Qi¹, Hui Huang, Tun Cao

¹Department of Electronic Science and Technology, Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Dalian, China.

|July 12, 2013

Summary

This study introduces a novel fiber optic pressure sensor. It offers high sensitivity and a tunable detection range by utilizing an off-center collimator and incident-angle sensitivity for precise pressure measurements.

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Area of Science:

Optoelectronics
Fiber optics
Sensor technology

Background:

Traditional fiber optic sensors often rely on working distance, which requires stringent control.
Existing methods may lack the sensitivity needed for certain pressure measurement applications.

Purpose of the Study:

To demonstrate a novel fiber optic pressure sensor with enhanced sensitivity and a tunable detection range.
To explore an incident-angle sensitive detection mechanism for improved performance.

Main Methods:

A fiber optic pressure sensor was designed with a collimator positioned off-center on a diaphragm.
The sensor's detection mechanism relies on incident-angle sensitivity, leveraging the coupling efficiency of the collimator.
Silicon diaphragms of 100 and 150 μm thickness were used to evaluate sensitivity.

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Last Updated: May 9, 2026

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

Published on: January 7, 2019

A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings

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Published on: March 24, 2023

Main Results:

The sensor exhibits incident-angle sensitivity, unlike traditional working-distance sensitive sensors.
High sensitivity was achieved due to the collimator's coupling efficiency being highly sensitive to the incident angle.
Sensitivities of 1.11 dB/KPa and 0.16 dB/KPa were obtained with 100 μm and 150 μm silicon diaphragms, respectively.
The detection range was shown to be continually adjustable by altering the pressure within the sealed diaphragm cavity.

Conclusions:

The demonstrated fiber optic pressure sensor offers a promising alternative to traditional designs.
Its incident-angle sensitive mechanism and tunable range enable precise and flexible pressure monitoring.
This technology has potential applications in various fields requiring accurate pressure sensing.