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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Y Jeyaram1, N Verellen, X Zheng
1Institute for Nanoscale Physics and Chemistry, INPAC, KU Leuven, Celestijnenlaan 200 D, B-3001 Leuven, Belgium. YogeshSharma.Jeyaram@fys.kuleuven.be
Introducing asymmetry in metallic Split Ring Resonators excites higher-order modes. Asymmetric resonators exhibit significantly higher quality factors for even modes compared to odd modes.
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