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Surface passivation of gallium nitride by ultrathin RF-magnetron sputtered Al2O3 gate

Hock Jin Quah1, Kuan Yew Cheong

  • 1Electronic Materials Research Group, School of Materials & Mineral Resources Engineering, Engineering Campus, Universiti Sains Malaysia, 14300 Nibong Tebal, Seberang Perai Selatan, Penang, Malaysia.

ACS Applied Materials & Interfaces
|July 24, 2013
PubMed

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