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Noise coefficients of backscattered electron detectors for low voltage scanning electron microscopy

J Hejna1

  • 1Institute of Material Science and Applied Mechanics, Wrocław University of Technology, Smoluchowskiego 25, 50-370, Wrocław, Poland.

Journal of Microscopy
|July 25, 2013
PubMed

Keywords:
Backscattered electronselectron detectorlow voltagenoise coefficientscanning electron microscopy

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