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Updated: May 9, 2026
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
An ultra-high Q silicon compound cantilever resonator for Young's modulus measurements
1Naval Research Laboratory, Washington, DC 20375, USA. tom.metcalf@nrl.navy.mil
The Review of Scientific Instruments
|August 2, 2013
Abstract:
We describe the design of ultra-high Q mechanical cantilever resonators, fabricated from single-crystal silicon wafers. The mechanical resonance mode at f ≈ 8.5 kHz achieves a background damping of Q(-1)
