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Updated: May 9, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
Published on: November 30, 2012
Demonstration of mid-infrared waveguide photonic crystal cavities
Hongtao Lin1, Lan Li, Fei Deng
1Department of Materials Science & Engineering, University of Delaware, Newark, Delaware 19716, USA.
Abstract:
We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from Ge23Sb7S70 chalcogenide glass (ChG) on CaF2 substrates by combing photolithographic patterning and focused ion beam milling. The waveguide-coupled cavities were characterized using a fiber end fire coupling method at 5.2 μm wavelength, and a loaded quality factor of ~2000 was measured near the critical coupling regime.
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