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Wavefront aberration compensation of projection lens using clocking lens elements.

ChunLai Liu¹, Wei Huang, Zhenguang Shi

¹State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, China. lcl8627@163.com

|August 6, 2013

Summary

Element clocking is an effective strategy for compensating low-order figure errors in high-performance lithographic lenses. This study presents a mathematical model and algorithm for optimizing element clocking, improving manufacturing accuracy.

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Area of Science:

Optical Engineering
Manufacturing Processes
Metrology

Background:

Achieving extreme high-performance in lithographic lenses requires precise manufacturing and advanced compensation strategies.
Element clocking is a known technique for correcting low-order figure errors in optical elements.
Existing commercial optical software often struggles with convergence for clocking optimization.

Purpose of the Study:

To develop a mathematical model for lithographic lenses that incorporates surface figure errors.
To create and implement a clocking optimization algorithm to address limitations in commercial software.
To validate the effectiveness of element clocking as a compensation strategy for lithographic lens manufacturing.

Main Methods:

Development of a novel mathematical model for lithographic lenses, including surface figure errors.
Programming a dedicated clocking optimization algorithm based on the proposed mathematical model.
Conducting a clocking optimization instance to test the algorithm's performance and validate the approach.

Main Results:

The developed clocking optimization algorithm successfully identified optimized element angles.
The optimization instance demonstrated that element clocking is a viable and effective compensation strategy.
The proposed mathematical model achieved acceptable accuracy for clocking optimization purposes.

Conclusions:

The proposed mathematical model and clocking optimization algorithm provide a robust solution for improving lithographic lens accuracy.
Element clocking is confirmed as an effective method for compensating low-order figure errors, overcoming commercial software limitations.
The developed approach is suitable for achieving the stringent accuracy requirements of high-performance lithographic lens manufacturing.