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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
3D spectral imaging with synchrotron Fourier transform infrared spectro-microtomography
Michael C Martin1, Charlotte Dabat-Blondeau, Miriam Unger
1Advanced Light Source Division, Lawrence Berkeley National Laboratory, Berkeley, California, USA. MCMartin@lbl.gov
Nature Methods
|August 6, 2013
Summary
Fourier transform infrared spectro-microtomography is a new 3D imaging method. This nondestructive technique reveals chemical distributions in intact samples by analyzing spectra from millions of voxels.
Area of Science:
- Chemical Imaging
- Spectroscopy
- 3D Microscopy
Background:
- Understanding chemical composition and distribution is crucial in materials science and biology.
- Existing imaging techniques may be destructive or lack chemical specificity.
- High-resolution, nondestructive chemical analysis is needed for intact samples.
Purpose of the Study:
- To introduce Fourier transform infrared spectro-microtomography (FTIS-microCT) as a novel 3D imaging modality.
- To demonstrate its capability for nondestructive chemical mapping of biological and material samples.
- To enhance the localization of chemical and morphological features within samples.
Main Methods:
- Combines Fourier transform infrared (FTIR) spectroscopy with micro-computed tomography (micro-CT).
- Acquires mid-infrared absorption contrast data across multiple projection angles.
- Reconstructs 3D datasets, yielding a full infrared spectrum for each voxel.
Main Results:
- Successfully generated 3D chemical maps of intact samples.
- Achieved high chemical and morphological localization.
- Acquired millions of spectra per sample, providing detailed chemical information.
- Demonstrated a nondestructive approach to chemical imaging.
Conclusions:
- FTIS-microCT is a powerful nondestructive 3D imaging technique.
- It enables detailed visualization of chemical distributions in complex samples.
- This method advances chemical and morphological analysis in various scientific fields.
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