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Modified stitching algorithm for annular subaperture stitching interferometry for aspheric surfaces.

Yongfu Wen1, Haobo Cheng, Hon-Yuen Tam

  • 1School of Optoelectronics, Beijing Institute of Technology, Beijing, China.

Applied Optics
|August 14, 2013
PubMed
Summary
This summary is machine-generated.

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A new stitching algorithm for annular subaperture stitching interferometry (ASSI) efficiently compensates for adjustment errors in aspheric surfaces. This method prevents error transmission and accumulation, ensuring accurate surface measurements.

Area of Science:

  • Optical Engineering
  • Metrology
  • Surface Metrology

Background:

  • Annular subaperture stitching interferometry (ASSI) is crucial for measuring complex aspheric surfaces.
  • Accurate measurement of aspheric surfaces is challenging due to inherent adjustment errors.
  • Existing stitching algorithms may suffer from error transmission and accumulation.

Purpose of the Study:

  • To propose a modified stitching algorithm for ASSI to address adjustment errors in aspheric surface measurement.
  • To develop a robust mathematical model for adjustment errors based on wavefront aberration theory.
  • To enhance the accuracy and reliability of aspheric surface metrology.

Main Methods:

  • Deduction of a mathematical model for adjustment error using wavefront aberration theory and rigid body movement.

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  • Development of a modified stitching algorithm based on the mathematical model and simultaneous least-squares method.
  • Utilizing standard deviation (SD) in overlapped regions as a figure of merit for stitching accuracy assessment.

    • Main Results:

    • The modified stitching algorithm effectively compensates for adjustment errors, preventing their transmission and accumulation.
    • Simulations and experimental results validate the algorithm's efficiency and rationality.
    • The proposed method demonstrates high accuracy in stitching interferometric data for aspheric surfaces.

    Conclusions:

    • The modified stitching algorithm offers an efficient solution for accurate aspheric surface measurement using ASSI.
    • The developed mathematical model and compensation strategy significantly improve metrology precision.
    • This approach is a valuable advancement for high-precision optical component manufacturing and testing.