Updated: May 8, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Zhiwen Lu1, Wenlu Sun, Qiugui Zhou
1Electrical and Computer Engineering, University of Virginia, Charlottesville, VA 22904, USA.
We developed balanced InGaAs/InP single photon avalanche diodes (SPADs) using sinusoidal gating and phase shifting to minimize noise. This innovation reduces afterpulsing, enabling sensitive photon detection with a low dark count rate.
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