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Updated: May 8, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Krzysztof Patorski1, Maciej Trusiak
1Warsaw University of Technology, Institute of Micromechanics and Photonics, 8 Sw A. Boboli St., 02-525 Warsaw, Poland. k.patorski@mchtr.pw.edu.pl
This study presents a robust method for visualizing dark Bessel fringes in microelectromechanical systems (MEMS) vibration testing. The technique corrects for noise and light variations without precise phase shifting, enhancing fringe pattern analysis.
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