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Related Experiment Video

Updated: May 8, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Stroboscopic white-light interferometry of vibrating microstructures.

Igor Shavrin¹, Lauri Lipiäinen, Kimmo Kokkonen

¹Fiber Optics Group, Department of Micro and Nanosciences, Aalto University, PO Box 13500, FI-00076 Aalto, Finland.

|August 14, 2013

Summary

We developed a new interferometer to precisely measure tiny surface vibrations in microstructures up to tens of MHz. This technology achieves sub-nanometer resolution, enabling detailed analysis of micro-electro-mechanical systems (MEMS) vibration modes.

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Last Updated: May 8, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

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Area of Science:

Optics and Photonics
Micro-electro-mechanical Systems (MEMS)
Vibration Analysis

Background:

Characterizing dynamic surface behavior in microstructures is crucial for MEMS device development.
Existing methods often lack the resolution or frequency range to capture subtle out-of-plane vibrations.
High-frequency, low-amplitude motion analysis is essential for understanding MEMS resonator performance.

Purpose of the Study:

To introduce a novel LED-based stroboscopic white-light interferometer for high-resolution surface vibration mapping.
To present a frequency-domain data analysis technique for enhanced vibration measurement accuracy.
To demonstrate the system's capability in analyzing microstructures with sub-nanometer amplitude resolution.

Main Methods:

Utilizing a LED-based stroboscopic white-light interferometer for interferometric phase measurements.
Implementing a frequency-domain data analysis approach leveraging high-resolution phase data.
Applying the technique to a square-plate silicon MEMS resonator to image vibration modes.

Main Results:

Successfully mapped out-of-plane surface vibration fields in a MEMS resonator.
Achieved sub-nanometer amplitude resolution for vibration frequencies up to tens of MHz.
Demonstrated a minimum detectable vibration amplitude below 100 picometers for modes between 3 and 14 MHz.

Conclusions:

The developed interferometer and analysis method provide unprecedented resolution for mapping micro-vibrations.
This technique is effective for characterizing dynamic behavior in electrically excited microstructures.
The system offers a powerful tool for research and development in MEMS and related fields.