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Updated: May 8, 2026

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
Published on: February 27, 2013
Fabrication of metal-oxide nano-hairs for effective index optical elements
Indumathi Raghu Srimathi1, Aaron J Pung, Yuan Li
1Holcombe Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies (COMSET), Clemson University, Clemson, South Carolina 29634, USA.
Abstract:
We present a method for fabricating high aspect ratio metal-oxide, sub-wavelength grating structures. These "nano-hair" structures are composed of alumina cylindrical pillars, partially embedded in a supporting fused silica substrate. The fabricated nano-hair structures demonstrate phase control of the transmitted beam while maintaining a peak transmitted power greater than 93% around a central wavelength of λ(o) = 1.55 µm. Based on this principle, discrete and continuous phase functions can be encoded by controlling the lithographic process.
