Updated: May 8, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
P Mechet1, S Verstuyft, T de Vries
1imec - Ghent University, Photonics Research Group - Department of Information Technology (INTEC), Sint-Pietersnieuwstraat 41, 9000 Ghent, Belgium. Pauline.Mechet@intec.ugent.be
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