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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Molecular layer deposition on carbon nanotubes.
Joseph J Brown1, Robert A Hall, Paul E Kladitis
1Department of Mechanical Engineering, University of Colorado , 427 UCB, Boulder, Colorado 80309-0427, United States.
ACS Nano
|August 15, 2013
Summary
Molecular layer deposition (MLD) created conformal coatings on carbon nanotubes (CNTs). This process enhanced CNT network mechanical properties, significantly improving Young
Area of Science:
- Materials Science
- Nanotechnology
- Surface Chemistry
Background:
- Carbon nanotubes (CNTs) possess excellent mechanical properties but require surface modification for enhanced performance.
- Conformal coatings are crucial for preserving and improving the intrinsic properties of nanostructures like CNTs.
Purpose of the Study:
- To investigate the application of metalcone Molecular Layer Deposition (MLD) for coating bulk carbon nanotubes.
- To evaluate the impact of MLD coatings on the mechanical properties of CNT networks.
Main Methods:
- Utilized metalcone MLD chemistries including alucone, titanicone, and zincone to deposit films on CNTs.
- Employed Transmission Electron Microscopy (TEM) to analyze coating conformality and structure.
- Conducted mechanical testing on MLD-coated CNT sheets to determine Young's Modulus.
Main Results:
- Achieved 3D conformal MLD films directly on CNTs without requiring an adhesion layer.
- Demonstrated significant improvements in Young's Modulus of CNT networks after MLD coating.
- Young's Modulus increased from 510 MPa for uncoated CNTs to up to 8.7 GPa for composite MLD coatings.
Conclusions:
- Metalcone MLD is an effective technique for conformally coating carbon nanotubes.
- MLD coatings substantially enhance the mechanical strength of CNT networks.
- The direct growth capability of MLD on CNTs simplifies the fabrication process.

