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Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
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Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection

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Nanometric resolution with far-field optical profilometry

S Arhab1, G Soriano, Y Ruan

  • 1Aix-Marseille Université, CNRS, Centrale Marseille, Institut Fresnel, UMR 7249, 13013 Marseille, France.

Physical Review Letters
|August 20, 2013
PubMed

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