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Minimum detectable air velocity by thermal flow sensors.

Safir Issa1, Walter Lang

  • 1IMSAS (Institute for Microsensors, Actuators and Systems), Microsystems Center Bremen (MCB), University of Bremen, Bremen D-28359, Germany. sissa@imsas.uni-bremen.de

Sensors (Basel, Switzerland)
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Summary

Miniaturized thermal flow sensors offer high sensitivity but face challenges from free convection. This study presents a new physical method to generate low airflows, achieving a minimum detectable velocity of 0.8 mm/s.

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Area of Science:

  • Sensor Technology
  • Fluid Dynamics
  • Metrology

Background:

  • Miniaturized thermal flow sensors offer advantages like small size, high sensitivity, and low power consumption.
  • Theoretical detection limits for air velocity are in the micrometers per second range.
  • Superimposed free convection and experimental challenges in generating low flows hinder achieving these limits.

Purpose of the Study:

  • To introduce a novel physical method for generating very low airflow values within the mixed convection region.
  • To characterize the performance of miniaturized thermal flow sensors under these controlled low-flow conditions.
  • To determine the minimum detectable air velocity achievable with the new method.

Main Methods:

  • Development and implementation of a physical method to generate controlled, low-magnitude airflows.
  • Experimental investigation of sensor characteristics in the zero-flow and mixed convection regimes.
  • Analysis of sensor response curves to determine minimum detectable air velocity and noise levels.

Main Results:

  • The presented physical method successfully generates very low flow values in the mixed convection region.
  • Sensor characteristic curves were obtained for both zero-flow and mixed convection conditions.
  • The estimated minimum detectable air velocity using the new method is 0.8 mm/s.
  • The sensor's noise level at zero flow is equivalent to an air velocity of approximately 0.13 mm/s.

Conclusions:

  • The developed physical method effectively addresses the challenge of generating and measuring very low air velocities.
  • The study demonstrates a practical approach to overcome free convection limitations in miniaturized thermal flow sensors.
  • The achieved minimum detectable air velocity of 0.8 mm/s represents a significant advancement for low-flow sensing applications.