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Niobium-based superconducting nano-device fabrication using all-metal suspended masks
S Samaddar1, D van Zanten, A Fay
1Institut Néel, CNRS, Université Joseph Fourier and Grenoble INP, 25 rue des Martyrs, Grenoble, France. sayanti.samaddar@grenoble.cnrs.fr
Abstract:
We report a novel method for the fabrication of superconducting nano-devices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium-gold-niobium proximity SQUIDs.
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