Methods for testing Zernike phase plates and a report on silicon-based phase plates with reduced charging and

Michael Marko1, Xing Meng, Chyongere Hsieh

  • 1New York State Department of Health, Wadsworth Center, Empire State Plaza, Albany, NY 12201, USA; College of Nanoscale Science and Engineering of the University at Albany, 251 Fuller Rd., Albany, NY 12203, USA.

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