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Updated: May 8, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Weighted simultaneous iterative reconstruction technique for single-axis tomography
1Triebenberg Laboratory, Institute of Structure Physics, Technische Universität Dresden, 01062 Dresden, Germany.
Abstract:
Tomographic techniques play a crucial role in imaging methods such as transmission electron microscopy (TEM) due to their unique capabilities to reconstruct three-dimensional object information. However, the accuracy of the two standard tomographic reconstruction techniques, the weighted back-projection (W-BP) and the simultaneous iterative reconstruction technique (SIRT) is reduced under common experimental restrictions, such as limited tilt range or noise. We demonstrate that the combination of W-BP and SIRT leads to an improved tomographic reconstruction technique: the weighted SIRT. Convergence, resolution and reconstruction error of the W-SIRT are analyzed by a detailed analytical, numerical, and experimental comparison with established methods. Our reconstruction technique is not restricted to TEM tomography but can be applied to all problems sharing single axis imaging geometry.
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