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Updated: May 7, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
15:25

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

Viscous damping and spring force calculation of regularly perforated MEMS microstructures in the Stokes'

Dorel Homentcovschi1, Bruce T Murray, Ronald N Miles

  • 1Department of Mechanical Engineering, SUNY Binghamton, NY-13902-6000, USA.

Sensors and Actuators. A, Physical
|September 24, 2013
PubMed

Keywords:
Perforated MicrostructuresSpring ForceStokes' equationsViscous Damping

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