Raman spectra of high- κ dielectric layers investigated with micro-Raman spectroscopy comparison with silicon dioxide

P Borowicz1, A Taube, W Rzodkiewicz

  • 1Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland ; Institute of Physical Chemistry, Polish Academy of Sciences, Kasprzaka 44/52, 01-224 Warsaw, Poland.

Thescientificworldjournal
|September 28, 2013
PubMed

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