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Updated: May 7, 2026
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Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates
Published on: July 2, 2012
Contamination of PDMS microchannels by lithographic molds
Andrea J Bubendorfer1, Bridget Ingham, John V Kennedy
1Callaghan Innovation Research Ltd, PO Box 31310, Lower Hutt 5040, New Zealand. andrea.bubendorfer@callaghaninnovation.govt.nz.
Lab on a Chip
|October 2, 2013
Abstract:
By use of synchrotron X-ray fluorescence and Rutherford backscattering spectrometry, we show the SU-8 soft lithographic process contaminates PDMS. Residues of the antimony containing photoinitiator are transferred from the master mold to the surface of PDMS, uncontrollably intensifying the surface potential, leading to electroosmotic flow variability in PDMS microfluidic devices.
