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Lensfree On-chip Tomographic Microscopy Employing Multi-angle Illumination and Pixel Super-resolution

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Simple approach for fast real-time line scan microscopic imaging.

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|October 3, 2013

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A novel microscopic imaging method uses wavelength-space-time mapping for rapid line scanning. This technique enhances semiconductor device inspection, speeding up quality control processes.

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Area of Science:

Optics and Photonics
Microscopy
Semiconductor Physics

Background:

Traditional microscopic imaging can be limited by speed and resolution.
Fast imaging is crucial for quality control in semiconductor manufacturing.

Purpose of the Study:

To propose and demonstrate a simple, fast line scan microscopic imaging approach.
To enhance the speed of microscopic imaging for practical applications like semiconductor inspection.

Main Methods:

A wavelength-space-time mapping technique was employed.
A lab-made subpicosecond pulse laser with a 12 nm bandwidth was utilized.
A free-space optical apparatus was designed and experimentally validated.

Main Results:

The system achieved a spatial resolution of 22 μm.
A field-of-view of 2.5 mm was realized.
A high line scan rate of 20.9 MHz was demonstrated.

Conclusions:

The proposed method offers a simple and fast solution for microscopic line scan imaging.
The technique is applicable to semiconductor device inspection, improving quality control efficiency.