A reference-beam autocollimator with nanoradian sensitivity from mHz to kHz and dynamic range of 10(7)

We describe an autocollimating optical angle sensor with a dynamic range of 9 mrad and nrad/√Hz sensitivity at frequencies from 5 mHz to 3 kHz. This work improves the standard multi-slit autocollimator design by adding two optical components, a reference mirror and a condensing lens. This autocollimator makes a differential measurement between a reference mirror and a target mirror, suppressing common-mode noise sources. The condensing lens reduces optical aberrations, increases intensity, and improves image quality. To further improve the stability of the device at low frequencies the body of the autocollimator is designed to reduce temperature variations and their effects. A new data processing technique was developed in order to suppress the effects of imperfections in the CCD.