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Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing.

Mai Trang Do, Thi Thanh Ngan Nguyen, Qinggele Li

    Optics Express
    |October 10, 2013
    PubMed
    Summary

    A novel one-photon laser fabrication method achieves 3D submicrometric structures comparable to two-photon excitation. This low-cost technique uses minimal laser power and offers a simpler alternative for creating intricate designs.

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    Area of Science:

    • Materials Science
    • Nanotechnology
    • Optics

    Background:

    • Two-photon excitation (TPA) is a common technique for 3D microfabrication.
    • Achieving submicrometric resolution typically requires high laser power and specialized equipment.

    Purpose of the Study:

    • To demonstrate a simplified and cost-effective 3D fabrication method using one-photon absorption.
    • To achieve submicrometric resolution comparable to TPA techniques.

    Main Methods:

    • Utilizing a continuous-wave laser at 532 nm in a very low absorption regime.
    • Employing a commercial SU8 photoresist for direct laser writing.
    • Investigating the ultralow one-photon absorption (LOPA) technique.

    Main Results:

    • Fabrication of 2D and 3D submicrometric structures (spiral, chiral, woodpile) with feature sizes as small as 190 nm.
    • Demonstration of high-resolution 3D patterning using only milliwatts of laser power.
    • Successful replication of TPA-based results with the LOPA method.

    Conclusions:

    • The LOPA technique offers a simpler and more economical approach to high-resolution 3D fabrication.
    • This method provides a viable alternative to TPA for creating complex microstructures.
    • The demonstrated technique has potential applications in various fields requiring precise 3D patterning.