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    This study demonstrates high-speed height measurement using whole-space tabulation method (WSTM) and light-source-stepping method (LSSM). The system achieved over 200 kHz LED response for accurate analysis of dynamic object behavior.

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    Area of Science:

    • Optical Metrology
    • High-Speed Imaging
    • Dynamic Shape Analysis

    Background:

    • Industrial applications demand high-speed height measurement for analyzing dynamic behaviors of objects.
    • Phase-shifting methods offer high spatial resolution for shape measurement.
    • Previous light-source-stepping methods (LSSM) using linear LED arrays achieved response speeds over 12 kHz.

    Purpose of the Study:

    • To investigate the feasibility of high-speed height measurement using WSTM and LSSM.
    • To evaluate the performance of a linear LED array and high-speed camera system for dynamic measurements.
    • To measure the height profile of a vibrating object at high speeds.

    Main Methods:

    • Implemented the whole-space tabulation method (WSTM) combined with light-source-stepping method (LSSM).
    • Utilized a linear LED array and a high-speed camera for data acquisition.
    • Employed a 3-step phase-shifting technique at 12 kHz for phase shifting.

    Main Results:

    • Verified the linear LED array response speed exceeded 200 kHz.
    • Successfully performed height measurement of a vibrating woofer at 4 kHz.
    • Demonstrated accurate shape measurement capabilities for dynamic objects.

    Conclusions:

    • The WSTM and LSSM approach with a high-speed linear LED array enables effective high-speed height measurement.
    • The system is suitable for analyzing the dynamic behavior of breaking, vibrating, or rotating objects.
    • Achieved high-speed measurement exceeding previous limitations.