Dynamic focus-tracking MEMS scanning micromirror with low actuation voltages for endoscopic imaging

Area of Science:

• Optics and Photonics
• Micro-electro-mechanical-systems (MEMS)
• Biomedical Engineering

Background:

• Traditional endoscopic imaging systems often lack advanced optical control capabilities.
• Integrating complex optical functions into miniaturized devices is crucial for next-generation medical probes.

Purpose of the Study:

• To demonstrate a novel MEMS micromirror device capable of simultaneous 2-D beam scanning and focus control.
• To design and fabricate a compact and efficient scanning mirror for potential integration into endoscopic imaging systems.

Main Methods:

• Utilized micro-electro-mechanical-systems (MEMS) technology for device fabrication.
• Employed a biaxial gimbal structure for 2-D beam scanning.
• Incorporated a deformable mirror membrane surface for focus control.

Main Results:

• Achieved an optical scanning range exceeding 16 degrees at resonance with less than 40 V actuation voltage.
• Demonstrated tunable focal length from infinity to 25 mm with less than 100 V applied bias.
• The 800 micrometer diameter micromirror is designed for compact integration.

Conclusions:

• The developed MEMS scanning mirror successfully integrates 2-D beam scanning and focus control.
• The device's compact size and efficient performance make it a promising candidate for future endoscopic imaging probes.
• This technology advances miniaturized optical scanning and focusing capabilities for medical applications.