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    This study introduces an improved fabrication process for flexible multielectrode arrays (MEAs). The new method enhances polydimethylsiloxane (PDMS) surface properties for efficient electrode and pad site opening without etching.

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    Area of Science:

    • Materials Science
    • Neuroscience Engineering
    • Biomedical Devices

    Background:

    • Flexible multielectrode arrays (MEAs) are crucial for neural interfaces.
    • Polyimide is a common MEA base material due to its processability as a photoresist, enabling precise fabrication.
    • Polydimethylsiloxane (PDMS) offers potential as an MEA base but suffers from poor surface energy and etching characteristics.

    Purpose of the Study:

    • To develop an improved fabrication process for flexible MEAs using PDMS.
    • To overcome the limitations of PDMS surface energy and etching properties.
    • To enable efficient opening of electrode and pad sites on PDMS without damaging the material.

    Main Methods:

    • A novel surface modification technique for PDMS was developed.
    • The process allows for long-term modification of PDMS surface energy.
    • A method for efficient site opening of electrodes and pads on modified PDMS was implemented, avoiding material etching.

    Main Results:

    • The proposed fabrication process successfully modified PDMS surface properties.
    • Efficient and precise opening of electrode and pad sites was achieved.
    • The process demonstrated long-term stability of PDMS surface modification.

    Conclusions:

    • The developed fabrication process offers a viable alternative for creating flexible MEAs with PDMS.
    • This method addresses key challenges associated with PDMS in MEA fabrication.
    • The technique facilitates reproducible and efficient manufacturing of neural interface devices.