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Updated: May 7, 2026

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PDMS Device Fabrication and Surface Modification
Published on: October 1, 2007
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25th anniversary article: CVD polymers: a new paradigm for surface modification and device fabrication
Anna Maria Coclite1, Rachel M Howden, David C Borrelli
1Institute of Solid State Physics, Graz University of Technology, Graz, 8010 , Austria.
Advanced Materials (Deerfield Beach, Fla.)
|October 12, 2013
Summary
Chemical Vapor Deposition (CVD) polymerization enables thin, conformal polymer coatings on diverse substrates at room temperature. This method allows for precise interfacial engineering and deposition of insoluble polymers without solvent damage.
Area of Science:
- Materials Science
- Polymer Chemistry
- Surface Engineering
Background:
- Thin polymer coatings are crucial for advanced technological applications.
- Conventional coating methods face limitations with certain substrates and polymer types.
- Need for versatile, solvent-free coating techniques is increasing.
Purpose of the Study:
- To explore the capabilities of Chemical Vapor Deposition (CVD) polymerization for creating functional polymer coatings.
- To demonstrate the applicability of CVD polymerization across a wide range of substrates.
- To highlight the advantages of CVD polymerization over traditional methods.
Main Methods:
- Monomers are delivered in the vapor phase to the substrate surface.
- Simultaneous polymerization and thin film formation occur on the substrate.
- Initiated-CVD and oxidative-CVD techniques are employed for specific polymer types.
Main Results:
- Achieved well-adhered, conformal, thin (<100 nm) polymer coatings.
- Demonstrated successful room-temperature modification of organic, inorganic, rigid, flexible, planar, and porous substrates.
- Enabled coating of insoluble polymers and prevented substrate damage from solvents.
- Showcased interfacial engineering, real-time monitoring, and thickness control.
- Initiated-CVD yielded engineered materials for controlled molecular interactions.
- Oxidative-CVD proved effective for depositing organic conducting and semiconducting polymers.
Conclusions:
- CVD polymerization is a versatile and effective technique for fabricating advanced polymer coatings.
- The method offers significant advantages, including substrate compatibility and solvent-free processing.
- CVD polymerization enables precise control over material properties and surface functionalities.

