25th anniversary article: CVD polymers: a new paradigm for surface modification and device fabrication

Anna Maria Coclite1, Rachel M Howden, David C Borrelli

  • 1Institute of Solid State Physics, Graz University of Technology, Graz, 8010 , Austria.

Summary

Chemical Vapor Deposition (CVD) polymerization enables thin, conformal polymer coatings on diverse substrates at room temperature. This method allows for precise interfacial engineering and deposition of insoluble polymers without solvent damage.