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Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges
1Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, 200 Union St. S.E., Minneapolis, MN, 55455, USA.
Abstract:
Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al2 O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.
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