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Microstructure and optical properties of Ag/ITO/Ag multilayer films
Zhaoqi Sun1, Maocui Zhang, Qiping Xia
1School of Physics & Materials Science, Anhui University, Hefei 230601, People's Republic of China. szq@ahu.edu.cn.
Abstract:
Transflective and highly conductive Ag/ITO/Ag multilayer films were prepared by magnetron sputtering on glass substrates. The microstructure and optical properties of Ag/ITO/Ag multilayer films were systematically investigated by X-ray diffraction, scanning electron microscopy, and ultraviolet-visible spectroscopy. The optical properties of the multilayer films were significantly influenced by the thickness of the Ag surface layer from 3.0 to 12.6 nm. The multilayer film of Ag9.3nm/ITO142nm/Ag9.3nm shows the best comprehensive property. It could satisfy the requirement for transflective LCD.
