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Optimized Fabrication Procedure for High-Quality Graphene-based Moiré Superlattice Devices
Published on: July 11, 2025
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A simple and scalable route to wafer-size patterned graphene
Li-Hong Liu1, Gilad Zorn, David G Castner
1Department of Chemistry, Portland State University, Portland, Oregon, 97207-0751, USA.
Summary
We developed a simple photocoupling chemistry method for large-scale graphene film patterning. This technique enables controllable feature sizes and shapes on various substrates for nanodevice fabrication.
Area of Science:
- Materials Science
- Nanotechnology
- Chemistry
Background:
- Large-scale graphene film patterning is crucial for nanodevice fabrication.
- Existing methods are often costly, low-throughput, or require complex equipment, limiting practical applications.
- A need exists for efficient and scalable graphene patterning techniques.
Purpose of the Study:
- To develop a simple, effective, and reproducible method for patterning graphene films.
- To achieve controllable feature sizes and shapes in graphene patterns.
- To demonstrate the versatility of the method across different substrates.
Main Methods:
- Utilized a versatile photocoupling chemistry for pattern generation.
- Employed conventional photolithography for fabricating graphene features.
- Applied the method to various substrates, including silicon wafers, glass slides, and metal films.
Main Results:
- Successfully patterned graphene films with controllable feature sizes, ranging from micrometers to centimeters.
- Demonstrated the simplicity, generality, and reproducibility of the photocoupling approach.
- Confirmed applicability to a wide range of substrates.
Conclusions:
- The developed photocoupling chemistry offers a straightforward and scalable solution for graphene patterning.
- This method overcomes limitations of current techniques, facilitating large-scale fabrication of graphene-based nanodevices.
- The technique's versatility and reproducibility make it suitable for diverse applications in nanotechnology.

