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Functionalized graphene as an ultrathin seed layer for the atomic layer deposition of conformal high-k dielectrics on

Woo Cheol Shin1, Jae Hoon Bong, Sung-Yool Choi

  • 1Department of Electrical Engineering, KAIST , Daejeon, Korea 305-701.

ACS Applied Materials & Interfaces
|November 1, 2013
PubMed

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