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Updated: May 6, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Note: Tunable overlapping half-ring resonator
H Torun1, S Sadeghzadeh, A D Yalcinkaya
1Department of Electrical and Electronics Engineering, Bogazici University, Bebek 34342, Istanbul, Turkey.
Abstract:
A unique tunable microwave resonator with a pair of half-rings is introduced and validated by experimental data. The capacitive gap between the overlapping areas can be controlled accurately using a magnetic actuator for tunability. The design geometry is scalable to cover different bands of electromagnetic spectrum. Transmission characteristics of the resonators have been modeled using finite-element analysis and have been measured. The experimental results indicate the resonant frequency can be controlled with a resolution of a few MHz in a tuning range of 38%. The resonator exhibits sharp transmission dips within the tuning range with measured quality factors larger than 2500.
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