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Process variation in silicon photonic devices.

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|November 13, 2013

Summary

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Process variations in silicon-on-insulator optical devices cause significant differences in optical response. These variations exhibit a "random walk" pattern, quantified as approximately 1 nm²/cm, impacting device performance predictability.

Area of Science:

Photonics and Materials Science
Integrated Optics and Semiconductor Fabrication

Background:

Foundry-fabricated silicon-on-insulator (SOI) wafers contain arrays of passive optical devices like microrings, racetrack resonators, and directional couplers.
Characterization reveals significant variations in the optical responses of these devices, impacting their performance and uniformity.

Purpose of the Study:

To quantify the process variation in passive SOI optical devices.
To understand the spatial correlation of these variations across fabricated wafers.
To establish a metric for process variation relevant to integrated photonic circuit design.

Main Methods:

Fabrication of four wafers with repeating patterns of SOI optical devices.
Physical and optical characterization of microrings, racetrack resonators, and directional couplers.

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Device-heating experiments to assess thermal effects and their spatial independence.

Statistical analysis of optical response variations (peak wavelength) across devices at varying spatial extents.

Main Results:

Optical responses of SOI devices exhibit significant, location-independent thermal effects.
Room-temperature optical response variations demonstrate a spatial correlation consistent with a "random walk" pattern.
Process variation is quantified as approximately 1 nm²/cm, aligning with existing literature values.

Conclusions:

Spatial process variations in SOI optical devices follow a predictable "random walk" model.
The quantified process variation (1 nm²/cm) provides a crucial parameter for designing robust integrated photonic circuits.
Understanding and quantifying these variations are essential for achieving reliable performance in foundry-fabricated photonic devices.