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In Situ Time-dependent Dielectric Breakdown in the Transmission Electron Microscope: A Possibility to Understand the Failure Mechanism in Microelectronic Devices
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In Situ Time-dependent Dielectric Breakdown in the Transmission Electron Microscope: A Possibility to Understand the Failure Mechanism in Microelectronic Devices

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Fracture mechanics of delamination defects in multilayer dielectric coatings

H P H Liddell, K Mehrotra, J C Lambropoulos

    Applied Optics
    |November 13, 2013
    PubMed

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