Slotted photonic crystal nanobeam cavity with parabolic modulated width stack for refractive index sensing

We present the design, fabrication, and the characterization of high-Q slotted 1D photonic crystal (PhC) cavities with parabolic-width stack. Their peculiar geometry enables the location of the resonating mode close to the air-band. The majority of optical field distributes in the slotted low-index area and the light matter interaction with the analytes has been enhanced. Cavities with measured Q-factors ~10(4) have been demonstrated. The refractive index sensing measurement for NaCl solutions with different concentrations shows a sensitivity around 410. Both the achieved Q-factor and the sensitivity are higher than the one reported recently by using 2D slotted PhC cavities. The total size for the sensing part of the present device is reduced to 16.8 × 2.5 μm(2).