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Measuring rough optical surfaces using scanning long-wave optical test system. 1. Principle and implementation.

Tianquan Su, Shanshan Wang, Robert E Parks

    Applied Optics
    |November 13, 2013
    PubMed
    Summary
    This summary is machine-generated.

    A new scanning long-wave optical test system (SLOTS) accurately measures rough aspherical surfaces, improving grinding accuracy. This low-cost, high-resolution deflectometry device overcomes current metrology limitations.

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    Area of Science:

    • Metrology
    • Optical Engineering
    • Surface Science

    Background:

    • Current metrology tools struggle to accurately measure rough aspherical surfaces (1-2 μm RMS roughness).
    • This limitation hinders precise shaping of aspherical components through grinding processes.

    Purpose of the Study:

    • To develop an accurate, high-resolution, and cost-effective metrology system for rough aspherical surfaces.
    • To improve the accuracy of grinding processes for aspherical components.

    Main Methods:

    • Development of the scanning long-wave optical test system (SLOTS), a long-wave infrared deflectometry device.
    • The system utilizes a heated metal ribbon and an uncooled thermal imaging camera.
    • Measurements were performed on spherical and ground aspherical surfaces.

    Main Results:

    • Achieved slope repeatability of 13.6 μrad and RMS surface accuracy of 31 nm on spherical surfaces.
    • Successfully measured the shape of a rough aspherical surface ground with 44 μm grits.
    • Results from SLOTS measurements correlated well with laser tracker data.

    Conclusions:

    • SLOTS offers a promising solution for accurate and rapid measurement of rough aspherical surfaces.
    • The system has the potential to provide essential guidance for optimizing aspheric grinding.
    • Further calibration could enhance the robustness and applicability of SLOTS in manufacturing.